JPH0337297B2 - - Google Patents

Info

Publication number
JPH0337297B2
JPH0337297B2 JP59224081A JP22408184A JPH0337297B2 JP H0337297 B2 JPH0337297 B2 JP H0337297B2 JP 59224081 A JP59224081 A JP 59224081A JP 22408184 A JP22408184 A JP 22408184A JP H0337297 B2 JPH0337297 B2 JP H0337297B2
Authority
JP
Japan
Prior art keywords
insulating film
primary
conductive film
deposited insulating
stepped portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59224081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61102752A (ja
Inventor
Tosho Ito
Jiro Ooshima
Masayasu Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP22408184A priority Critical patent/JPS61102752A/ja
Publication of JPS61102752A publication Critical patent/JPS61102752A/ja
Publication of JPH0337297B2 publication Critical patent/JPH0337297B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP22408184A 1984-10-26 1984-10-26 半導体装置及びその製造方法 Granted JPS61102752A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22408184A JPS61102752A (ja) 1984-10-26 1984-10-26 半導体装置及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22408184A JPS61102752A (ja) 1984-10-26 1984-10-26 半導体装置及びその製造方法

Publications (2)

Publication Number Publication Date
JPS61102752A JPS61102752A (ja) 1986-05-21
JPH0337297B2 true JPH0337297B2 (en]) 1991-06-05

Family

ID=16808258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22408184A Granted JPS61102752A (ja) 1984-10-26 1984-10-26 半導体装置及びその製造方法

Country Status (1)

Country Link
JP (1) JPS61102752A (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737853A (en) * 1980-08-18 1982-03-02 Toshiba Corp Forming method for multilayer thin-film

Also Published As

Publication number Publication date
JPS61102752A (ja) 1986-05-21

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